S301 – Turn-key deposition system

  • S-301 IJD deposition system
  • IJD System - S301
  • Noivion Deposition System S301
  • Heated rotary 4'' sample holder

A turn-key fully equipped IJD coating system.
The perfect solution for scientific research, process development and small coating service.

SKU: S301 Category:

The S301 is the standard single IJD source coating system.
Is designed to provide all common functions and options for scientific research and process development at a competitive price.
Coats samples up to 4”, is equipped as a standard with a rotary sample holder ad single target holder.


  • Stainless steel chamber
  • Large frontal door with view port for easy access and monitoring
  • Rotary sample holder up to 4” with customizable sample support/mask
  • Optional lateral rotary target holder for coating on cylindrical surfaces
  • Adjustable sample-target distance
  • Rotary target  holder with adjustable position
  • Set-up for both 45° or 90° IJD mounting configuration
  • Set-up for load-lock chamber
  • Sample heating (optional)

Technical data

  • Base vacuum
  • Sample size
  • Rotary sample holder with customizable sample support/mask
  • Adjustable sample-target distance
  • Rotary target holder
  • Adjustable target-source distance
  • Multi target holder
  • Lateral rotary sample holder
  • Sample heating
  • Load lock with sample transfer
  • <1×10-5 mBar
  • up to 4″
  • base 70 mm Z-stroke -50/+100 mm
  • +5/-15 mm
  • Optional
  • Optional
  • Optional
  • Optional


S301 is an ideal deposition system system for

  • research
  • process development
  • small production batches

See IJD in action in this video

For more information write at info@noivion.com or contact your local distributor.