c) Atomic Oxygen Generator (AtOx)

A turn-key fully equipped system for atomic oxygen (AtOx) production.

SKU: AtOx Category:

Atomic Oxygen Generator is an effective and efficient technology for production of atomic oxygen (AtOx) as a key facort for testing various applications in various industries (Aerospace, Medical, Food).

Features

  • Vacuum chamber equipped with viewport and quick access door
  • Vacuum pumping system with primary and turbo pumps, base pressure < 10-5 mbar
  • Gas control system with Mass Flow Controller
  • IJD based AtOx source
  • PLC control system
  • HMI touch panel
  • Sample holder with position and tilt adjustment
  • Sample water cooling can be provided as an option

Technical data

  • Atomic oxygen energy
  • Atomic oxygen flux
  • Base pressure
  • Working pressure
  • Pulse width
  • Pulse repetition rate
  • Acceleration voltage
  • Acceleration voltage polarity
  • Pulse peak current
  • 1 – 5 eV
  • > 1015 atoms/ (s·cm2)
  • < 10-5 mbar (without oxygen flow)
  • < 5×10-3 mbar
  • < 1 µs
  • 5 – 100 Hz adjustable
  • 0 – 25kV adjustable
  • negative
  • >1 kA

Applications

AtOx is an ideal research system for aerospace component testing, sterilization applications.

Download

Atomic Oxygen Generation By Pulsed Eelectron Discharge –  AtOx datasheet

For more information write at sales@noivion.com or contact your local distributor.