K1A – IJD Source

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  • IJD K1A
  • Power And Control Module for IJD
  • IJD-K1 Touch panel user interface

Standalone IJD Source. For mounting on existing chambers and systems. CF40 mounting flange, direct gas feed, 90 deg target-source geometry make the K1A probably the most compact and advanced Pulsed Electron Deposition (PED) solution on the market.

SKU: K1A Categories: ,

The K1A source is the new improved IJD solution, includes a compact IJD head at 90° orientation, an ESD unit and a 500W/25kV HV Power Control Module. Requires one CF40 and one CF63 ports in order to be installed or two CF63. Other configurations are available on request to match existing vacuum chamber sizes and  geometries. The power and control unit includes a touch screen with user friendly interface. Acceleration voltage and repetition frequency are tunable.

  • the CF40 mount flange make this the most compact pulsed electron deposition source on the market
  • direct source gas feed
  • improved pressure working range
  • 90 deg target-source geometry allows deposition in-line and on large objects
  • embedded pulse frequency control
  • better plasma protection for reduced maintenance intervals
  • removable head design for faster maintenance/cleaning
  • no gas switches are used (thyratron) for improved reliability

For information about IJD technology and working principle see the TECHNOLOGY section.

See IJD in action in this video  

SPECIFICATIONS

IJD SOURCE

Terminal electrode: stainless steel
Triggering: glow discharge
Mounting: DN40CF or CN63CF
Orientation: 90° source axis vs target axis
Port-aligner for head position fine tuning:
Gas supply: direct
Chamber operating pressure: 5×10-4 – 1.4×10-3 mbar (in O2)
Repetition rate: adjustable (*)
Nominal acceleration voltage: up to 25 kV
Working gas: O2, N2, Ar, air
UHV construction: available ON REQUEST

ESD Energy storage and delivery unit

Is mounted on the vaacum chamber and connected internally to the source. Stores the energy that is delivered to the source during each discharge. Can be shared between multiple sources.

Mounting: DN63CF
Orientation: any
Stored Energy: up to 13J

PCM Power and Control Module

Includes the high voltage ESD charging, Source triggering electronics and the user and auxiliary interfaces.

Nominal output voltage: max 25 kV
Average charging rate: 500 J/s or higher on request
Adjustable pulse frequency: 5 – 100 Hz (*)
Input power supply: 220 VAC 10A
User interface: 7” touch panel
External PC/PLC/industrial bus interface (EtherCAT, PROFIBUS, etc..) : available on request
Rated AC power: 1 kW
Dimension: 6U rack mountable or bench top

* The maximum frequency actually reachable depends by system energy parameters: stored energy, acceleration voltage, HVDC power supply charging rate. For example: a 500J/s power supply can sustain max 35Hz repetition rate at 20kV and 8 J/pulse or 90Hz at 16 kV.

For more information write at info@noivion.com or contact your local distributor.

APPLICATIONS

Thin film deposition of a very wide range of materials in reactive or non-reactive mode:

See IJD in action in this video  

For more information write at info@noivion.com or contact your local distributor.